When I started working with EBL, I often heard something like: “Load the GDSII file and write the pattern.” It sounds very simple. We make the pattern in CAD, export the GDSII file, load it into the EBL software and…
When I first started learning about positioning in an EBL system, I thought alignment marks were mainly used to tell the machine where the wafer was. But then I had another question. If the wafer is already mounted on a…
While learning more about electron beam lithography, I had one practical question. Suppose someone gives me a GDSII file and asks me to write the pattern using EBL. The pattern is already designed. The dimensions are already there in the…
By Gurwinder Singh Introduction When we talk about semiconductor chips, one sentence comes up again and again: “Modern chips contain billions of transistors.” I have heard this many times, and because of that, it is easy to start thinking that…